On iron-doped diamond-like films produced in a hollow cathode discharge

I. A. Sorokin; Сорокин И. А.; D. V. Kolodko; Колодко Д. В.

doi:10.31857/S0033849424100099

On iron-doped diamond-like films produced in a hollow cathode discharge

作者: Sorokin I.A.¹^,2, Kolodko D.V.¹^,2
隶属关系:
1. Fryazino Branch Kotelnikov Institute of Radioengineering and Electronics of RAS
2. National Research Nuclear University MEPhI
期: 卷 69, 编号 10 (2024)
页面: 996-999
栏目: НАНОЭЛЕКТРОНИКА
URL: https://cardiosomatics.ru/0033-8494/article/view/684752
DOI: https://doi.org/10.31857/S0033849424100099
EDN: https://elibrary.ru/HPSZRU
ID: 684752

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The paper presents the results of measuring the current-voltage characteristics of iron-doped diamond-like films obtained by a combined method of physical sputtering of an iron cathode and plasma-chemical deposition in a hollow-cathode discharge. The nonlinear nature of the transverse conductivity of the film and a significant influence of the amplitude value of the sweep voltage on the amplitude value of the current and the shape of the current-voltage characteristic were shown.

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diamond-like carbon, plasma-chemical deposition, hollow-cathode discharge, thin film, nonlinear current-voltage characteristic, electrical conductivity

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作者简介

I. Sorokin

Fryazino Branch Kotelnikov Institute of Radioengineering and Electronics of RAS; National Research Nuclear University MEPhI

编辑信件的主要联系方式.
Email: iasorokin@mail.ru
俄罗斯联邦, Vvedenskii Squar.1, Fryazino, Moscow Region, 141190; Kashirskoe Shosse, 31, Moscow, 115409

D. Kolodko

Fryazino Branch Kotelnikov Institute of Radioengineering and Electronics of RAS; National Research Nuclear University MEPhI

Email: iasorokin@mail.ru
俄罗斯联邦, Vvedenskii Squar.1, Fryazino, Moscow Region, 141190; Kashirskoe Shosse, 31, Moscow, 115409

参考

Сорокин И.А., Колодко Д.В., Краснобаев К.И. // РЭ. 2020. Т.65. №3. С.288.
Sorokin I.A., Kolodko D.V. // Vacuum. 2023. V. 207. Article No. 111570.
Vedeneev A. S., Luzanov V. A., Rylkov V. V. // Semiconductors. 2019. V. 53. № 14. P. 1970.
Николаев С.Н., Веденеев А.С., Лузанов В.А. и др. // РЭ. 2021. Т. 66. № 10. С. 1024.

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2. Fig. 1. Schematic diagram of the experiment (a) and conductivity measurements (b) of the diamond-like film: BP - power supply unit, A - picoampermeter.

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3. Fig. 2. Current dependence in the DLC(Fe) circuit at different values of the sweep voltage amplitude: Um = 1 (1), 5 (2), 7.5 (3) and 10 V (4).

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4. Fig. 3. Volt-ampere characteristics of the DLC(Fe) thin film for different values of the sweep voltage amplitude: a) Um = 1 V (solid curve), b) Um = 5 (1), 7.5 (2) and 10 V (3).