Frequency Dependence of the Parameters of the Inductive RF Discharge Located in the Low-Value Magnetic Field

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Resumo

In this work, we carried out studies of the properties of an inductive RF discharge placed in a magnetic field with an induction of less than 70 G at frequencies of 2, 4 and 13.56 MHz. Experiments have shown that when operating at frequencies of 2 and 4 MHz at low powers of the RF generator, the range of existence of the discharge is limited by large magnetic fields. The efficiency of RF power input η non-monotonically depends on the magnitude of the magnetic field. The position of the main maximum η shifts to the region of higher B with increasing frequency, power of the RF generator and argon pressure, and at the same time the maximum broadens. An increase in frequency, power and argon pressure is accompanied by an increase in the absolute values of η. When operating at a frequency of 4 MHz, in addition to the main maximum η, a local maximum appears in the region B 35–70 G. With increasing pressure, a shift in the position of the local maximum and its smoothing is observed. Comparison of experimental data with calculated data allows us to conclude that the local maximum of plasma density observed at weak magnetic fields is associated with resonant excitation of waves in the plasma source. At a frequency of 2 MHz, the excited wave is close to a transverse helicon, and at a frequency of 13.56 MHz, its properties approach the Trivelpiece–Gold wave.

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Sobre autores

A. Nikonov

Lomonosov Moscow State University

Email: ekralkina@mail.ru
Rússia, Moscow

K. Vavilin

Lomonosov Moscow State University

Email: ekralkina@mail.ru
Rússia, Moscow

I. Zadiriev

Lomonosov Moscow State University

Email: ekralkina@mail.ru
Rússia, Moscow

S. Dvinin

Lomonosov Moscow State University

Email: ekralkina@mail.ru
Rússia, Moscow

E. Kralkina

Lomonosov Moscow State University

Autor responsável pela correspondência
Email: ekralkina@mail.ru
Rússia, Moscow

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2. Fig. 1. Scheme of plasma source: 1 - quartz cylinder, 2 - vacuum chamber, 3 - metal flange, 4 - bottom electrode with a hole, 5 - spiral antenna, 6 - electromagnet; 7 - matching system; 8 - RF generator, 9 - probe, 10 - gas lead

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3. Fig. 2. Typical magnetic field distribution along the axis of the IP. The current through the electromagnet is 6 A. The z coordinate is read from the upper flange

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4. Fig. 3. Dependence of RF power embedding efficiency on the external magnetic field induction at RF generator powers: 1 - 300 W, 2 - 500 W, 3 - 800 W; f = 2 MHz, p = 0. 6 mTorr (a); f = 2 MHz, p = 6 mTorr (b); f = 4 MHz, p = 0.3 mTorr (c); f = 4 MHz, p = 3 mTorr (d); f = 13.56 MHz, p = 0.3 mTorr (e); f = 13.56 MHz, p = 3 mTorr (f)

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5. Fig. 4. Dependence of RF power embedding efficiency on the external magnetic field induction at different argon pressures: 1 - 0.3 mTorr, 2 - 0.6 mTorr, 3 - 0.8 mTorr, 4 - 3 mTorr, 5 - 6 mTorr; f = 4 MHz, Pgen = 500 W

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6. Fig. 5. Axial dependence of the amplitude (a-c) and phase (d-e) of the longitudinal RF magnetic field for operating frequencies of 2 MHz (a, d), 4 MHz (b, e), and 13.56 MHz (c, f); Pgen = 500 W, p = 0.8 mTorr. The area of the antenna location is marked in grey: 1 - 0 Gs, 2 - 24 Gs, 3 - 36 Gs, 4 - 48 Gs, 5 - 60 Gs

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7. Fig. 6. Axial dependence of the longitudinal RF magnetic field amplitude for operating frequencies of 2 MHz (a) and 4 MHz (b), measured: 1 - at the plasma source axis, at distance 2 - 5 cm and 3 - 8.7 cm from the axis. Pgen = 500 W, p = 0.8 mTorr, B = 24 Gs. The area of the antenna location is marked in grey

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8. Fig. 7. Dependence of the ion saturation current i+ on the distance from the top flange z at different distances from the FE axis r: 0 Gs (a), 36 Gs (b), 60 Gs (c)

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9. Fig. 8. Dependence of the equivalent plasma resistance on the magnetic field induction calculated for values l = 1, 2, 3, 4; f = 13.56 MHz, p = 1 mTorr, ne = 1∙1011 cm-3

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10. Fig. 9. Dependence of the equivalent plasma resistance on the induction of the external magnetic field for l = 2: 1 - f = 2 MHz, p = 1 mTorr; 2 - f = 4 MHz, p = 1 mTorr; 3 - f = 13.56 MHz, p = 1 mTorr; 4 - f = 13.56 MHz, p = 6 mTorr; ne = 1∙1011 cm-3

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11. Fig. 10. Dependence of the calculated equivalent plasma resistance on the magnetic field; f = 13.56 MHz, p = 1 mTorr; 1 - ne = 1∙1010 cm-3, 2 - 3 ∙1010 cm-3, 3 - 1 ∙1011 cm-3, 4 - 3 ∙1011 cm-3

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12. Fig. 11. Dependences of the calculated longitudinal, radial, and azimuthal electric fields on the value of the external magnetic field: 2 MHz (a), 13.56 MHz (b); 1 - Ez, 2 - Eφ, 3 - Er; ne = 1-1011 cm-3

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13. Fig. 12. Dependence of the calculated amplitudes of the azimuthal and longitudinal components of the Travelpis-Gold (1) and helicon (2) waves on the external magnetic field: 2 MHz (a, b); 13.56 MHz (c, d); ne = 1 -1011 cm-3

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14. Fig. 13. Dependence of the calculated efficiency of RF power insertion into the plasma source (a) and electron concentration (b) on the external magnetic field value: 1 - f = 2 MHz, p = 1 mTorr; 2 - f = 4 MHz, p = 1 mTorr; 3 - f = 13.56 MHz, p = 1 mTorr; 4 - f = 13.56 MHz, p = 6 mTorr; Pgen = 800 W, Rant = 1 ohm

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